Multichannel Boron Doped Nanocrystalline Diamond Ultramicroelectrode Arrays: Design, Fabrication and Characterization

Raphael Kiran (1) , Lionel Rousseau (2, 3) , Gaelle Bazin Lissorgues (3) , Emmanuel Scorsone (1) , Alexandre Bongrain (1) , Blaise Yvert (4) , Serge Picaud (5) , Pascal Mailley (6) , Philippe Bergonzo (1)

1 LCD (CEA, LIST) - Laboratoire Capteurs Diamant (CEA, LIST)
2 ESIEE Paris
3 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
4 Brain Tech Lab - BrainTech Laboratory [CHU Grenoble Alpes - Inserm U1205]
5 Institut de la Vision
6 DTS - Département des Technologies Solaires

We report on the fabrication and characterization of an 8 × 8 multichannel Boron Doped Diamond (BDD) ultramicro-electrode array (UMEA). The device combines both the assets of microelectrodes, resulting from conditions in mass transport from the bulk solution toward the electrode, and of BDD's remarkable intrinsic electrochemical properties. The UMEAs were fabricated using an original approach relying on the selective growth of diamond over pre-processed 4 inches silicon substrates. The prepared UMEAs were characterized by cyclic voltammetry (CV) and electrochemical impedance spectroscopy (EIS). The results demonstrated that the electrodes have exhibited a very fast electrode transfer rate (k 0) up to 0.05 cm•s −1 (in a fast redox couple) and on average, a steady state limiting current (in a 0.5 M potassium chloride aqueous solution containing OPEN ACCESS Sensors 2012, 12 7670 1 mM Fe(CN) 6 4− ion at 100 mV•s −1) of 1.8 nA. The UMEAs are targeted for electrophysiological as well as analytical applications.

Mots clés: ultramicroelectrode; boron doped diamond; electrochemical impedance spectroscopy; biosensor array; statistical study of microelectrode arrays

Domaines: Electromagnétisme; Matériaux; Micro et nanotechnologies/Microélectronique; Electronique; Biomatériaux

Raphael Kiran, Lionel Rousseau, Gaelle Bazin Lissorgues, Emmanuel Scorsone, Alexandre Bongrain, et al.. Multichannel Boron Doped Nanocrystalline Diamond Ultramicroelectrode Arrays: Design, Fabrication and Characterization. Sensors, 2012, 12 (6), pp.7669-7681. ⟨10.3390/s120607669⟩. ⟨hal-02434398⟩