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Microscopie magnétique locale par intégration de nanocapteurs magnétorésistifs

Abstract : Magnetoresistive scanning probe microscopy is based on fabrication and use of micro-cantilevers integrating giant magnetoresistive (GMR) or tunnel magnetoresistive sensors (TMR). These probes enable simultaneous measurement of decorrelated topography and local magnetic signal of the sample. The sensor can be manufactured down to submicron characteristic size. GMR measurement is sensitive (detection limit around 1 nT), quantitative, broadband (DC-100 MHz), robust in time and does not require frequent remagnetization or recalibration of the probe. The main study topics of this PhD are focused on developping and integrating magnetoresistive nanosensors on silicon nitride micro-cantilevers. They enhance spatial resolution while improving the linearity of the magnetic response and reducing magnetic noise. Pinning strategies have been used to stabilize the noise so as to improve repeatability and detection limit by one order of magnitude Sensors down to a few hundreds of nanometers have been manufactured, using dedicated and state-of-the-art GMR stacks. We tested reliability and efficiency of the nano-GMR probes by integrating them on an atomic force microscope (AFM), thus paving the way for an innovative local magnetic imaging method based of magnetic susceptibility measurement.
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Julien Moulin. Microscopie magnétique locale par intégration de nanocapteurs magnétorésistifs. Electromagnétisme. Université Paris-Saclay, 2020. Français. ⟨NNT : 2020UPASP025⟩. ⟨tel-02976807⟩

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