Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer- scale hole array structures

Ya Zhang (1) , Boqi Qiu , Naomi Nagai , Masahiro Nomura , Sebastian Volz (2) , Kazuhiko Hirakawa

1 SYSU - Sun Yat-sen University [Guangzhou]
2 EM2C - Laboratoire d'Énergétique Moléculaire et Macroscopique, Combustion

A generalized self-consistent model for quantum tunneling current in dissimilar metal-insulator-metal junction AIP Advances 9, 085302 (2019); https://doi.org/10.1063/1.5116204 Study on impulse quenching based multichamber arc quenching structure AIP Advances 9, 085104 (2019); https://doi.org/10.1063/1.5113853 Dependence of plasma current on object condition in atmospheric pressure non-thermal equilibrium argon plasma AIP Advances 9, 085202 (2019); https://doi.

Domaines: Science des matériaux [cond-mat.mtrl-sci]; Thermique [physics.class-ph]; Micro et nanotechnologies/Microélectronique

Ya Zhang, Boqi Qiu, Naomi Nagai, Masahiro Nomura, Sebastian Volz, et al.. Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer- scale hole array structures. AIP Advances, 2019, ⟨10.1063/1.5113521⟩. ⟨hal-02364483⟩