Characterization of electrical and mechanical coupling in MEMS gyroscopes with electrical measurements

Margot Morlans (1) , Jean Guerard (1) , Jerome Juillard (2)

1 DPHY, ONERA, Université Paris Saclay [Châtillon]
2 GeePs - Laboratoire Génie électrique et électronique de Paris

We propose an intuitive way to characterize the parasitic couplings in a weakly-coupled resonator. Here the study is focused on MEMS gyroscopes, one example of coupled resonator. Knowing the value of electrical and mechanical coupling will then allow us to electronically cancel them, and thus to reduce the bias instability of the gyroscope measures.

Mots clés: MEMS; Gyroscope; Mechanical coupling; Sensor characterization; Weakly-coupled resonators; Quadrature error

Domaines: Sciences de l'ingénieur [physics]; Physique [physics]

Margot Morlans, Jean Guerard, Jerome Juillard. Characterization of electrical and mechanical coupling in MEMS gyroscopes with electrical measurements. 2021 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), Aug 2021, Paris, France. ⟨10.1109/DTIP54218.2021.9568500⟩. ⟨hal-03454425⟩