Modelling of nonlinear circular plates using modal analysis: simulation and model validation

Eric Colinet (1) , Jérôme Juillard (2)

1 CEA
2 SUPELEC-Campus Gif

A method for simulating the large-displacement actuation of deformable micro-structures is proposed and illustrated in the case of a circular axisymmetric plate. First of all the problem is formulated and its boundary conditions are expressed as functions of the two unknowns, displacements and the Airy stress function. The problem is then split into two parts, each part corresponding to one equation of Von Karman, to which the techniques of modal analysis are applied in order to obtain a set of nonlinear ordinary differential equations. The implementation of the resulting high-level model is then discussed and some simulation results are given, as a basis for comparison.

Domaines: Modélisation et simulation; Micro et nanotechnologies/Microélectronique; Equations aux dérivées partielles [math.AP]

Eric Colinet, Jérôme Juillard. Modelling of nonlinear circular plates using modal analysis: simulation and model validation. Journal of Micromechanics and Microengineering, 2006, vol.16, pp.448-456. ⟨10.1088/0960-1317/16/2/031⟩. ⟨hal-00253875⟩