A reduced-order model of squeeze-film damping for deformable micromechanical structures including large displacement effects

Alexia Missoffe (1) , Jérôme Juillard (1) , Denis Aubry (2)

1 SUPELEC-Campus Gif
2 MSSMat - Laboratoire de mécanique des sols, structures et matériaux

Correct modelling of damping is essentiel to capture the dynamic behaviour of a NEMS device. Our interest is squeeze-film damping which models the behaviour of a fluid in small gaps between a fixed surface and a structure moving perpendicular to this surface. The lateral dimensions of the surfaces are large compared to the gap and the system is considered isothermal. Squeeze film damping is then governed by the Reynolds equation.

Keywords: squeeze-film damping; reduced-order modelling; microswitch; piecewise linear

Domains: Modeling and Simulation; Analysis of PDEs [math.AP]; Micro and nanotechnologies/Microelectronics; Mechanics of materials [physics.class-ph]; Mechanics of materials [physics.class-ph]

Alexia Missoffe, Jérôme Juillard, Denis Aubry. A reduced-order model of squeeze-film damping for deformable micromechanical structures including large displacement effects. Journal of Micromechanics and Microengineering, 2008, 18 (3), pp.035042. ⟨10.1088/0960-1317/18/3/035042⟩. ⟨hal-00270341v2⟩