Simultaneous height, resistance and capacitance cartography of a SRAM test sample by conducting probe AFM

Pascal Chrétien (1) , Olivier Schneegans (1) , Frédéric Houzé (1) , René Meyer (1) , Lionel Boyer (1)

1 LGEP - Laboratoire de génie électrique de Paris

Pascal Chrétien, Olivier Schneegans, Frédéric Houzé, René Meyer, Lionel Boyer. Simultaneous height, resistance and capacitance cartography of a SRAM test sample by conducting probe AFM. Seing at the Nanoscale II, 2004, France. ⟨hal-00320180⟩