Investigation of nc-Si inclusions behaviour in multilayer a-Si:H films obtained by layer by layer technique - Archive ouverte HAL Access content directly
Journal Articles Journal of Non-Crystalline Solids Year : 2004

Investigation of nc-Si inclusions behaviour in multilayer a-Si:H films obtained by layer by layer technique

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hal-00320870 , version 1 (11-09-2008)

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  • HAL Id : hal-00320870 , version 1

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Alexander Gudovskikh, Jean-Paul Kleider, V.P. Afanasjev, A.Z. Kazak-Kazakevich, A.P. Sazanov. Investigation of nc-Si inclusions behaviour in multilayer a-Si:H films obtained by layer by layer technique. Journal of Non-Crystalline Solids, 2004, 338-340, pp.135-138. ⟨hal-00320870⟩
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