Investigation of nc-Si inclusions behaviour in multilayer a-Si:H films obtained by layer by layer technique - CentraleSupélec Access content directly
Journal Articles Journal of Non-Crystalline Solids Year : 2004

Investigation of nc-Si inclusions behaviour in multilayer a-Si:H films obtained by layer by layer technique

Alexander Gudovskikh
  • Function : Author
Laboratoire de génie électrique de Paris
Jean-Paul Kleider
Laboratoire de génie électrique de Paris
CV
V.P. Afanasjev
  • Function : Author
A.Z. Kazak-Kazakevich
  • Function : Author
A.P. Sazanov
  • Function : Author

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https://hal-centralesupelec.archives-ouvertes.fr/hal-00320870

Submitted on : Thursday, September 11, 2008-5:33:36 PM

Last modification on : Friday, March 24, 2023-2:52:50 PM

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hal-00320870 , version 1 (11-09-2008)

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  • HAL Id : hal-00320870 , version 1

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Alexander Gudovskikh, Jean-Paul Kleider, V.P. Afanasjev, A.Z. Kazak-Kazakevich, A.P. Sazanov. Investigation of nc-Si inclusions behaviour in multilayer a-Si:H films obtained by layer by layer technique. Journal of Non-Crystalline Solids, 2004, 338-340, pp.135-138. ⟨hal-00320870⟩

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SUPELEC UPMC EC-PARIS CNRS SUP_LGEP CENTRALESUPELEC UNIV-PARIS-SACLAY SORBONNE-UNIVERSITE
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