Correlation between plasma chemistry, microstructure and electronic properties of Si:H thin films prepared by hydrogen dilution

P. Chaudhuri , D. Das , P.P. Ray , Namita Dutta Gupta (1) , Dhananjoy Roy (1) , Christophe Longeaud (1)

1 LGEP - Laboratoire de génie électrique de Paris

P. Chaudhuri, D. Das, P.P. Ray, Namita Dutta Gupta, Dhananjoy Roy, et al.. Correlation between plasma chemistry, microstructure and electronic properties of Si:H thin films prepared by hydrogen dilution. Journal of Non-Crystalline Solids, 2004, 338-340, pp.236. ⟨hal-00321015⟩