Study of powders formed at low power in a silane-argon discharge and their effect on the properties of hydrogenated amorphous silicon thin films

P. Chaudhuri; Namita Dutta Gupta; A. Bhaduri; Christophe Longeaud; S. Vignoli; O. Marty

Journal Articles Journal of Applied Physics Year : 2005

Study of powders formed at low power in a silane-argon discharge and their effect on the properties of hydrogenated amorphous silicon thin films

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1

P. Chaudhuri

Function : Author

Namita Dutta Gupta

Function : Author

Laboratoire de génie électrique de Paris

A. Bhaduri

Function : Author

Christophe Longeaud

Function : Author
PersonId : 6409
IdHAL : christophe-longeaud
IdRef : 076747425

Laboratoire de génie électrique de Paris

S. Vignoli

Function : Author

O. Marty

Function : Author

Olivier Schneegans : Connect in order to contact the contributor

https://hal-centralesupelec.archives-ouvertes.fr/hal-00321244

Submitted on : Friday, September 12, 2008-4:15:12 PM

Last modification on : Tuesday, February 14, 2023-3:38:22 AM

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hal-00321244 , version 1 (12-09-2008)

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HAL Id : hal-00321244 , version 1

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P. Chaudhuri, Namita Dutta Gupta, A. Bhaduri, Christophe Longeaud, S. Vignoli, et al.. Study of powders formed at low power in a silane-argon discharge and their effect on the properties of hydrogenated amorphous silicon thin films. Journal of Applied Physics, 2005, 98, pp.44913. ⟨hal-00321244⟩

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Study of powders formed at low power in a silane-argon discharge and their effect on the properties of hydrogenated amorphous silicon thin films

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