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Journal Articles Journal of Applied Physics Year : 2008

Structural and optoelectronic properties of SiGe alloy thin films deposited by pulsed RF plasma CVD

A. Bhaduri
  • Function : Author
P. Chaudhuri
  • Function : Author
D.L. Williamson
  • Function : Author
S. Vignoli
  • Function : Author
P.P. Ray
  • Function : Author
Christophe Longeaud
Laboratoire de génie électrique de Paris

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https://hal-centralesupelec.archives-ouvertes.fr/hal-00350895

Submitted on : Wednesday, January 7, 2009-5:21:20 PM

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hal-00350895 , version 1 (07-01-2009)

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  • HAL Id : hal-00350895 , version 1

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A. Bhaduri, P. Chaudhuri, D.L. Williamson, S. Vignoli, P.P. Ray, et al.. Structural and optoelectronic properties of SiGe alloy thin films deposited by pulsed RF plasma CVD. Journal of Applied Physics, 2008, 104, pp.063709. ⟨hal-00350895⟩

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SUPELEC UPMC EC-PARIS CNRS SUP_LGEP CENTRALESUPELEC UNIV-PARIS-SACLAY SORBONNE-UNIVERSITE
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