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Conference Papers Year : 2008

Device grade hydrogenated polymorphous silicon deposited at high rates

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https://hal-centralesupelec.archives-ouvertes.fr/hal-00351235

Submitted on : Thursday, January 8, 2009-5:03:34 PM

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hal-00351235 , version 1 (08-01-2009)

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  • HAL Id : hal-00351235 , version 1

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Yrebegnan Moussa Soro, Marie-Estelle Gueunier-Farret, Christophe Longeaud, Jean-Paul Kleider. Device grade hydrogenated polymorphous silicon deposited at high rates. Journées annuelles de la SF2M 2008, Jun 2008, Paris, France. pp.CD-ROM. ⟨hal-00351235⟩

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SUPELEC UPMC EC-PARIS CNRS SUP_LGEP CENTRALESUPELEC UNIV-PARIS-SACLAY SORBONNE-UNIVERSITE
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