Enhancing the frequency stability of a NEMS oscillator with electrostatic and mechanical nonlinearities

Jérôme Juillard (1) , Grégory Ardnt (2) , Eric Colinet (2)

1 E3S - Supélec Sciences des Systèmes
2 DSYS - Département Systèmes

We show how to achieve large-amplitude oscillation and good frequency stability in a nonlinear NEMS oscillator by using a softening nonlinearity to locally balance the hardening behaviour of the Duffing nonlinearity for a given motion amplitude. The case when the softening behaviour is obtained via electrostatic biasing is theoretically investigated, under parallel-plate assumptions, for a fully-capacitive pulse-actuated resonant structure. This is validated by simulated data, in the case of a resonant clamped-clamped beam.

Domaines: Systèmes dynamiques [math.DS]; Micro et nanotechnologies/Microélectronique; Traitement du signal et de l'image [eess.SP]; Traitement du signal et de l'image [eess.SP]

Jérôme Juillard, Grégory Ardnt, Eric Colinet. Enhancing the frequency stability of a NEMS oscillator with electrostatic and mechanical nonlinearities. Eurosensors'09, Procedia Chemistry, Sep 2009, Lausanne, Switzerland. pp.1415-1418. ⟨hal-00445428⟩