A Low-Cost, Built-In Self-Test Method for Resistive MEMS sensors

Olivier Legendre (1) , H. Bertin (1) , O. Garel (1) , H. Mathias (1) , S. Megherbi (1) , Kian Jafaridinani (2) , Jérôme Juillard (2) , Eric Colinet (3)

1 IEF- Paris Sud XI
2 E3S - Supélec Sciences des Systèmes
3 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

This paper illustrates the experimental application of the LIMBO method, an identification method based on binary observations dedicated to the (self-) test of integrated electronic and electromechanical systems, such as MEMS. The tested MEMS device is a micro-wire used as a heating resistor, inserted in a Wheatstone bridge. We show how the impulse response and the offset of the micro device are estimated only using binary inputs and outputs and straightforward calculations, which can easily be implemented on an FPGA. This approach only requires a 1-bit ADC and a 1-bit DAC, which makes it very amenable to integration and highlights its suitability for the test of systems based on resistive sensor and/or actuator.

Domains: Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics; Statistics [stat]; Applications [stat.AP]

Olivier Legendre, H. Bertin, O. Garel, H. Mathias, S. Megherbi, et al.. A Low-Cost, Built-In Self-Test Method for Resistive MEMS sensors. Eurosensors XXV (Eurosensors'11), Sep 2011, Athens, Greece. pp.182-185. ⟨hal-00646316⟩