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Conference Papers Year : 2011

Interface properties of amorphous-crystalline silicon heterojunctions prepared using DC saddle-field PECVD

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Submitted on : Thursday, June 21, 2012-3:53:14 PM

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hal-00710771 , version 1 (21-06-2012)

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  • HAL Id : hal-00710771 , version 1

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Basia Halliop, Marie-France Salaün, Wilfried Favre, Renaud Varache, Marie-Estelle Gueunier-Farret, et al.. Interface properties of amorphous-crystalline silicon heterojunctions prepared using DC saddle-field PECVD. ICANS24, Aug 2011, Nara, Japan. ⟨hal-00710771⟩

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SUPELEC UPMC EC-PARIS CNRS SUP_LGEP CENTRALESUPELEC UNIV-PARIS-SACLAY SORBONNE-UNIVERSITE
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