Analysis of a MEMS-based ring oscillator

J.L. Munoz-Gamarra (1) , N. Barniol (1) , Jérôme Juillard (2)

1 UAB - Universitat Autònoma de Barcelona = Autonomous University of Barcelona = Universidad Autónoma de Barcelona
2 E3S - Supélec Sciences des Systèmes

This work introduces a MEMS oscillator composed exclusively of mechanical switches as logic components. The electromechanical model of the system is developed and the conditions for a periodic response are established.

Domaines: Micro et nanotechnologies/Microélectronique

J.L. Munoz-Gamarra, N. Barniol, Jérôme Juillard. Analysis of a MEMS-based ring oscillator. 2012 IEEE International Symposium on Circuits and Systems (ISCAS 2012), May 2012, Seoul, South Korea. pp.2103-2106, ⟨10.1109/ISCAS.2012.6271700⟩. ⟨hal-00725674⟩