Influence of excitation waveform and oscillator geometry on the resonant pull-in of capacitive MEMS oscillators

Jérome Juillard (1) , Grégory Arndt (1) , Julien Arcamone (2) , Eric Colinet (3)

1 E3S - Supélec Sciences des Systèmes
2 DSYS - Département Systèmes
3 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information

The purpose of this paper is to provide a simple framework for determining the resonant pull-in of MEMS oscillators, either parallel-plate, CC-beam or cantilever, under one- sided and two-sided sinusoidal, square-wave or pulse- actuation. Furthermore, the values of the resonant and static pull-in amplitudes are calculated and tabulated, in all the considered cases.

Domaines: Systèmes dynamiques [math.DS]; Micro et nanotechnologies/Microélectronique

Jérome Juillard, Grégory Arndt, Julien Arcamone, Eric Colinet. Influence of excitation waveform and oscillator geometry on the resonant pull-in of capacitive MEMS oscillators. DTIP 2013, Apr 2013, Barcelona, Spain. pp.2-5. ⟨hal-00830533⟩