Structural and electrical properties of hydrogenated microcrystalline silicon-carbon alloys deposited at low substrate temperature by RF-PECVD - Archive ouverte HAL Access content directly
Conference Papers Year : 2014

Structural and electrical properties of hydrogenated microcrystalline silicon-carbon alloys deposited at low substrate temperature by RF-PECVD

Sofia Gaiaschi
  • Function : Author
Laboratoire de génie électrique de Paris
Marie-Estelle Gueunier-Farret
Laboratoire de génie électrique de Paris
CV
Christophe Longeaud
Laboratoire de génie électrique de Paris
E.V. Johnson
CV
P. Chapon
  • Function : Author
Jean-Paul Kleider
Laboratoire de génie électrique de Paris
CV

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Physics [physics]

Thierry Leblanc  : Connect in order to contact the contributor

https://hal-centralesupelec.archives-ouvertes.fr/hal-01099579

Submitted on : Sunday, January 4, 2015-7:11:29 PM

Last modification on : Friday, March 24, 2023-2:53:00 PM

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hal-01099579 , version 1 (04-01-2015)

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  • HAL Id : hal-01099579 , version 1

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Sofia Gaiaschi, Marie-Estelle Gueunier-Farret, Christophe Longeaud, E.V. Johnson, P. Chapon, et al.. Structural and electrical properties of hydrogenated microcrystalline silicon-carbon alloys deposited at low substrate temperature by RF-PECVD. E-MRS Spring Meeting 2014, European Materials Research Society, May 2014, Lille, France. ⟨hal-01099579⟩

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