S. D. Senturia, Microsystems Design, pp.249-259, 2000.

P. M. Osterberg and S. D. Senturia, M-TEST: A test chip for MEMS material property measurement using electrostatically actuated test structures, Journal of Microelectromechanical Systems, vol.6, issue.2, pp.107-118, 1997.
DOI : 10.1109/84.585788

G. N. Nielsonn and G. Barbastathis, Dynamic Pull-In of Parallel-Plate and Torsional Electrostatic MEMS Actuators, Journal of Microelectromechanical Systems, vol.15, issue.4, pp.811-821, 2006.
DOI : 10.1109/JMEMS.2006.879121

S. Krylov, Lyapunov exponents as a criterion for the dynamic pull-in instability of electrostatically actuated microstructures, International Journal of Non-Linear Mechanics, vol.42, issue.4, pp.626-642, 2007.
DOI : 10.1016/j.ijnonlinmec.2007.01.004

V. Leus and D. Elata, On the Dynamic Response of Electrostatic MEMS Switches, Journal of Microelectromechanical Systems, vol.17, issue.1, pp.236-243, 2008.
DOI : 10.1109/JMEMS.2007.908752

F. M. Alsaleem, M. I. Younis, and L. Ruzziconi, An Experimental and Theoretical Investigation of Dynamic Pull-In in MEMS Resonators Actuated Electrostatically, Journal of Microelectromechanical Systems, vol.19, issue.4, pp.794-806, 2010.
DOI : 10.1109/JMEMS.2010.2047846

A. H. Nayfeh, M. I. Younis, and E. M. Abdel-rahman, Dynamic pull-in phenomenon in MEMS resonators, Nonlinear Dynamics, vol.20, issue.1-2, pp.153-163, 2007.
DOI : 10.1007/s11071-006-9079-z

A. H. Nayfeh and M. I. Younis, Dynamics of MEMS resonators under superharmonic and subharmonic excitations, Journal of Micromechanics and Microengineering, vol.15, issue.10, pp.1840-1847, 2005.
DOI : 10.1088/0960-1317/15/10/008

V. Kaajakari, T. Mattila, A. Oja, and H. Seppä, Nonlinear Limits for Single-Crystal Silicon Microresonators, Journal of Microelectromechanical Systems, vol.13, issue.5, pp.715-724, 2004.
DOI : 10.1109/JMEMS.2004.835771

G. Arndt, System architecture and circuit design for micro and nanoresonators-based mass sensing arrays, 2011.
URL : https://hal.archives-ouvertes.fr/tel-00658843

A. Gelb and W. , Van der Velde Multiple-input describing functions and nonlinear system design, 1968.

T. A. Roessig-;-r, A. P. Howe, J. H. Pisano, and . Smith, Surface-micromachined resonant accelerometer, Proceedings of International Solid State Sensors and Actuators Conference (Transducers '97), pp.859-862, 1997.
DOI : 10.1109/SENSOR.1997.635237

C. T. Nguyen and R. T. Howe, An integrated CMOS micromechanical resonator high-Q oscillator, IEEE Journal of Solid-State Circuits, vol.34, issue.4, pp.440-455, 1999.
DOI : 10.1109/4.753677

K. E. Wojciechowski, B. E. Boser, and A. P. Pisano, A MEMS resonant strain sensor operated in air, 17th IEEE International Conference on Micro Electro Mechanical Systems. Maastricht MEMS 2004 Technical Digest, pp.841-845, 2004.
DOI : 10.1109/MEMS.2004.1290718

B. Bahreyni and C. Shafai, Oscillator and frequency-shift measurement circuit topologies for micromachined resonant devices, Sensors and Actuators A: Physical, vol.137, issue.1, pp.74-80, 2007.
DOI : 10.1016/j.sna.2007.02.003

J. Verd, Monolithic CMOS MEMS Oscillator Circuit for Sensing in the Attogram Range Electron Device Letters, pp.146-148, 2008.

A. A. Trusov, S. A. Zotov, B. R. Simon, and A. M. Shkel, Silicon accelerometer with differential Frequency Modulation and continuous self-calibration, 2013 IEEE 26th International Conference on Micro Electro Mechanical Systems (MEMS), pp.29-32, 2013.
DOI : 10.1109/MEMSYS.2013.6474168

J. I. Seeger and B. E. Boser, Dynamics and control of parallel-plate actuators beyond the electrostatic instability, International Conference on Solid-State Sensors and Actuators (TRANSDUCERS), pp.474-477, 1999.

A. Fargas-marques, J. Casals-terré, and A. M. Shkel, Resonant Pull-In Condition in Parallel-Plate Electrostatic Actuators, Journal of Microelectromechanical Systems, vol.16, issue.5, pp.1044-1053, 2007.
DOI : 10.1109/JMEMS.2007.900893

J. Juillard, G. Arndt, J. Arcamone, and E. Colinet, Influence of excitation waveform and oscillator geometry on the resonant pull-in of capacitive MEMS oscillators, Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), pp.1-4, 2013.
URL : https://hal.archives-ouvertes.fr/hal-00830533

E. Colinet, J. Juillard, S. Guessab, and R. Kielbasa, Actuation of resonant MEMS using short pulsed forces, Sensors and Actuators A: Physical, vol.115, issue.1, pp.118-125, 2004.
DOI : 10.1016/j.sna.2004.04.004

J. Juillard, A. Bonnoit, E. Avignon, S. Hentz, and E. Colinet, Large amplitude dynamics of micro-/nanomechanical resonators actuated with electrostatic pulses, Journal of Applied Physics, vol.107, issue.1, pp.14907-14908, 2010.
DOI : 10.1063/1.3277022
URL : https://hal.archives-ouvertes.fr/hal-00450352

J. Juillard, G. Arndt, and E. Colinet, Modeling of Micromachined Beams Subject to Nonlinear Restoring or Damping Forces, Journal of Microelectromechanical Systems, vol.20, issue.1, pp.165-177, 2011.
DOI : 10.1109/JMEMS.2010.2090650
URL : https://hal.archives-ouvertes.fr/hal-00649345

L. D. Gabbay, J. E. Mehner, and S. D. Senturia, Computer-aided generation of nonlinear reduced-order dynamic macromodels. I. Non-stress-stiffened case, Journal of Microelectromechanical Systems, vol.9, issue.2, pp.262-269, 2000.
DOI : 10.1109/84.846707

A. Brenes, J. Juillard, F. Vinci, and . Santos, Electrostatically-induced modal crosstalk phenomena in resonant MEMS sensors, 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), pp.294-297, 2014.
DOI : 10.1109/DTIP.2014.7056659
URL : https://hal.archives-ouvertes.fr/hal-01086397

J. Juillard, A comparative study of reduced-order modeling techniques for nonlinear MEMS beams, 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), pp.261-265, 2014.
DOI : 10.1109/DTIP.2014.7056674
URL : https://hal.archives-ouvertes.fr/hal-01083889