Characterization of MEMS resonators via feedthrough de-embedding of harmonic and subharmonic pulsed-mode response

Alexis Brenes 1, 2, 3 Jérôme Juillard 1 Filipe Vinci dos Santos 2 Alain Bonnoit 1
1 GeePs - Laboratoire Génie électrique et électronique de Paris
2 Chaire Conception Analogique Avancée Thales/Supélec
Thales Communications [Colombes], E3S - Supélec Sciences des Systèmes [Gif-sur-Yvette]
3 Thales Avionics SAS, Valence, France
Abstract : In this paper, we model and give experimental evidence of the efficiency of pulsed-mode actuation for the characterization of capacitive MEMS resonators. In particular, we show how to process the pulsed-mode response in two modes (harmonic and subharmonic) so as to eliminate parasitic feedthrough effects and characterize the resonator more accurately. We test our approach on a pressure sensor, developed by THALES Avionics, used for avionics applications. In contrast to the existing state-of-the-art techniques, the methods described in this paper can be used to characterize electrostatic MEMS without the use of a spectrum analyzer or high-performance ADC.
Keywords : Pulsed-mode response Time domain signal processing Open-loop actuation MEMS characterization Capacitive feedthrough
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Alexis Brenes, Jérôme Juillard, Filipe Vinci dos Santos, Alain Bonnoit. Characterization of MEMS resonators via feedthrough de-embedding of harmonic and subharmonic pulsed-mode response. Sensors and Actuators A: Physical , Elsevier, 2015, 229, pp.211-217. ⟨10.1016/j.sna.2015.02.032⟩. ⟨hal-01235587⟩

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