Characterization of MEMS resonators via feedthrough de-embedding of harmonic and subharmonic pulsed-mode response

Alexis Brenes 1, 2, 3 Jérôme Juillard 1 Filipe Vinci dos Santos 2 Alain Bonnoit 1
1 GeePs - Laboratoire Génie électrique et électronique de Paris
2 Chaire Conception Analogique Avancée Thales/Supélec
Thales Communications [Colombes], E3S - Supélec Sciences des Systèmes [Gif-sur-Yvette]
3 Thales Avionics SAS, Valence, France
Abstract : In this paper, we model and give experimental evidence of the efficiency of pulsed-mode actuation for the characterization of capacitive MEMS resonators. In particular, we show how to process the pulsed-mode response in two modes (harmonic and subharmonic) so as to eliminate parasitic feedthrough effects and characterize the resonator more accurately. We test our approach on a pressure sensor, developed by THALES Avionics, used for avionics applications. In contrast to the existing state-of-the-art techniques, the methods described in this paper can be used to characterize electrostatic MEMS without the use of a spectrum analyzer or high-performance ADC.
Keywords : Pulsed-mode response Time domain signal processing Open-loop actuation MEMS characterization Capacitive feedthrough
Document type :
Journal articles
Complete list of metadatas

Cited literature [13 references]  Display  Hide  Download
https://hal-centralesupelec.archives-ouvertes.fr/hal-01235587
Contributor : Alexandra Siebert <>
Submitted on : Tuesday, December 1, 2015 - 9:57:23 AM
Last modification on : Friday, May 24, 2019 - 5:23:53 PM
Long-term archiving on : Saturday, April 29, 2017 - 12:40:56 AM

File

Brenes_Sensors-and-Actuators-A...
Files produced by the author(s)

Identifiers

Collections

UPMC | SUP_CHAIRE-CAA | CENTRALESUPELEC | ECO2 | GEEPS | UNIV-PARIS-SACLAY | SORBONNE-UNIVERSITE | SU-SCIENCES

Citation

Alexis Brenes, Jérôme Juillard, Filipe Vinci dos Santos, Alain Bonnoit. Characterization of MEMS resonators via feedthrough de-embedding of harmonic and subharmonic pulsed-mode response. Sensors and Actuators A: Physical , Elsevier, 2015, 229, pp.211-217. ⟨10.1016/j.sna.2015.02.032⟩. ⟨hal-01235587⟩

Export

BibTeX TEI DC DCterms EndNote

Share

Metrics

Record views

279

Files downloads

523

Contact

support.ccsd.cnrs.fr
hal.support@ccsd.cnrs.fr
Logo CCSD