Direct parameter extraction in feedthrough-embedded capacitive MEMS resonators, Sensors and Actuators A: Physical, vol.167, issue.2, pp.237-244, 2011. ,
DOI : 10.1016/j.sna.2011.02.016
First Harmonic (2f) Characterisation of Resonant Frequency and Q-Factor of Micromechanical Transducers, Analog Integrated Circuits and Signal Processing, pp.37-54, 2003. ,
Enhanced transduction methods for electrostatically driven MEMS resonators, Solid-State Sensors, Actuators and Microsystems Conference (TRANSDUCERS), pp.561-564, 2009. ,
A Novel Capacitive Detection Scheme With Inherent Self-Calibration, Journal of Microelectromechanical Systems, vol.16, issue.6, pp.1324-1333, 2007. ,
DOI : 10.1109/JMEMS.2007.906077
An energy-efficient readout circuit for resonant sensors based on ring-down measurement, Review of Scientific Instruments, vol.84, issue.2, 2013. ,
DOI : 10.1063/1.4792396
A new micromachined silicon high-accuracy pressure sensor, Sensors and Actuators A, pp.46-47, 1995. ,
Electrostatically-induced modal crosstalk phenomena in resonant MEMS sensors, 2014 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), pp.294-297, 2014. ,
DOI : 10.1109/DTIP.2014.7056659
URL : https://hal.archives-ouvertes.fr/hal-01086397
Single-Device and On-Chip Feedthrough Cancellation for Hybrid MEMS Resonators, IEEE Transactions on Industrial Electronics, vol.59, issue.12, pp.12-4930, 2012. ,
DOI : 10.1109/TIE.2011.2180274
Creep as a reliability problem in MEMS, Microelectronics Reliability, pp.1733-1738, 2004. ,
Tensile-mode fatigue testing of silicon films as structural materials for MEMS, Sensors and Actuators A, pp.93-70, 2001. ,
Characterization of CMOS-MEMS resonator by pulsed mode electrostatic actuation, 2010 IEEE International Frequency Control Symposium, pp.415-418, 2010. ,
DOI : 10.1109/FREQ.2010.5556300
He earned an Engineering degree from Ecole Centrale Paris Châtenay-Malabry, France in 2010 and Master's degrees in Physics and Nanotechnology from Ecole Normale Supérieure (ENS) He has been researching characterization methods and nonlinearities in MEMS since He is currently a Ph.D. candidate at the Ecole Supérieure d'Electricité (Supélec), employed by THALES Avionics, under the supervision of Pr, Juillard and Pr. F. Vinci dos Santos. His research interests include sensors for aeronautics, MEMS characterization, nonlinear oscillators, design and testing, 1987. ,
(electronics engineering) and M.Sc. (microelectronics) from the Federal University of Rio de Janeiro in 1989 and 1992, respectively, and his Ph.D. degree (physics-microelectronics) from the University of Grenoble I, France in 1998. From 1992 to 2002 he was a research associate at CERN (European Laboratory for Particle Physics), Geneva, developing solid-state radiation imaging systems for biomedical applications, radiation-hard front-end electronics for high-energy physics detectors and FPGA-based schedulers for ,