Parameter estimation from nonlinear frequency response of MEMS resonators

Alexis Brenes 1, 2, 3 Jérôme Juillard 1 Laurent Bourgois 1 Filipe Vinci dos Santos 2
1 GeePs - Laboratoire Génie électrique et électronique de Paris
2 Chaire Conception Analogique Avancée Thales/Supélec
Thales Communications [Colombes], E3S - Supélec Sciences des Systèmes [Gif-sur-Yvette]
3 Thales Avionics SAS, Valence, France
Abstract : This paper deals with parameter extraction from nonlinear frequency responses of resonant systems. We show that nonlinear frequency responses can be exploited to identify not only the Q-factor and the natural frequency of a resonator, but also information about its internal structure. The proposed method requires less demanding measurements and is less model-dependent than the existing state-of-the-art methods. Its accuracy is illustrated with simulations and it is experimentally validated on a capacitive MEMS resonator
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Conference papers
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https://hal-centralesupelec.archives-ouvertes.fr/hal-01235608
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Submitted on : Friday, December 4, 2015 - 2:08:55 PM
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Alexis Brenes, Jérôme Juillard, Laurent Bourgois, Filipe Vinci dos Santos. Parameter estimation from nonlinear frequency response of MEMS resonators. 2015 IEEE International Symposium on Circuits and Systems (ISCAS) , May 2015, Lisbonne, Portugal. pp.1318-1319, ⟨10.1109/ISCAS.2015.7168884⟩. ⟨hal-01235608⟩

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