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Conference papers
Parameter estimation from nonlinear frequency response of MEMS resonators
Abstract : This paper deals with parameter extraction from nonlinear frequency responses of resonant systems. We show that nonlinear frequency responses can be exploited to identify not only the Q-factor and the natural frequency of a resonator, but also information about its internal structure. The proposed method requires less demanding measurements and is less model-dependent than the existing state-of-the-art methods. Its accuracy is illustrated with simulations and it is experimentally validated on a capacitive MEMS resonator
https://hal-centralesupelec.archives-ouvertes.fr/hal-01235608
Contributor : Alexandra Siebert <>
Submitted on : Friday, December 4, 2015 - 2:08:55 PM
Last modification on : Wednesday, April 14, 2021 - 3:36:18 AM
Long-term archiving on: : Saturday, March 5, 2016 - 10:50:57 AM
Contributor : Alexandra Siebert <>
Submitted on : Friday, December 4, 2015 - 2:08:55 PM
Last modification on : Wednesday, April 14, 2021 - 3:36:18 AM
Long-term archiving on: : Saturday, March 5, 2016 - 10:50:57 AM
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Brenes_ISCAS 2015.pdf
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