Parameter estimation from nonlinear frequency response of MEMS resonators

Abstract : This paper deals with parameter extraction from nonlinear frequency responses of resonant systems. We show that nonlinear frequency responses can be exploited to identify not only the Q-factor and the natural frequency of a resonator, but also information about its internal structure. The proposed method requires less demanding measurements and is less model-dependent than the existing state-of-the-art methods. Its accuracy is illustrated with simulations and it is experimentally validated on a capacitive MEMS resonator
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Alexis Brenes, Jérôme Juillard, Laurent Bourgois, Filipe Vinci dos Santos. Parameter estimation from nonlinear frequency response of MEMS resonators. 2015 IEEE International Symposium on Circuits and Systems (ISCAS) , May 2015, Lisbonne, Portugal. pp.1318-1319, ⟨10.1109/ISCAS.2015.7168884⟩. ⟨hal-01235608⟩

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