Parameter estimation from nonlinear frequency response of MEMS resonators

Alexis Brenes (1, 2, 3) , Jérôme Juillard (1) , Laurent Bourgois (1) , Filipe Vinci dos Santos (2)

1 GeePs - Laboratoire Génie électrique et électronique de Paris
2 Chaire Conception Analogique Avancée Thales/Supélec
3 Thales Avionics SAS, Valence, France

This paper deals with parameter extraction from nonlinear frequency responses of resonant systems. We show that nonlinear frequency responses can be exploited to identify not only the Q-factor and the natural frequency of a resonator, but also information about its internal structure. The proposed method requires less demanding measurements and is less model-dependent than the existing state-of-the-art methods. Its accuracy is illustrated with simulations and it is experimentally validated on a capacitive MEMS resonator

Domains: Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics

Alexis Brenes, Jérôme Juillard, Laurent Bourgois, Filipe Vinci dos Santos. Parameter estimation from nonlinear frequency response of MEMS resonators. 2015 IEEE International Symposium on Circuits and Systems (ISCAS) , May 2015, Lisbonne, Portugal. pp.1318-1319, ⟨10.1109/ISCAS.2015.7168884⟩. ⟨hal-01235608⟩