 |
Conference papers
Parameter estimation from nonlinear frequency response of MEMS resonators
Abstract : This paper deals with parameter extraction from nonlinear frequency responses of resonant systems. We show that nonlinear frequency responses can be exploited to identify not only the Q-factor and the natural frequency of a resonator, but also information about its internal structure. The proposed method requires less demanding measurements and is less model-dependent than the existing state-of-the-art methods. Its accuracy is illustrated with simulations and it is experimentally validated on a capacitive MEMS resonator
https://hal-centralesupelec.archives-ouvertes.fr/hal-01235608
Contributor : Alexandra Siebert Connect in order to contact the contributor
Submitted on : Friday, December 4, 2015 - 2:08:55 PM
Last modification on : Thursday, September 9, 2021 - 3:03:04 AM
Long-term archiving on: : Saturday, March 5, 2016 - 10:50:57 AM
Contributor : Alexandra Siebert Connect in order to contact the contributor
Submitted on : Friday, December 4, 2015 - 2:08:55 PM
Last modification on : Thursday, September 9, 2021 - 3:03:04 AM
Long-term archiving on: : Saturday, March 5, 2016 - 10:50:57 AM
File
Brenes_ISCAS 2015.pdf
Files produced by the author(s)