A further study of reduced-order modeling techniques for nonlinear MEMS beams

Jérôme Juillard (1) , Gabriel Vidal-Alvarez (2) , Nuria Barniol (2)

1 GeePs - Laboratoire Génie électrique et électronique de Paris
2 UAB - Universitat Autònoma de Barcelona = Autonomous University of Barcelona = Universidad Autónoma de Barcelona

This paper gives a further look at reduced-order modeling (ROM) techniques that can be applied to MEMS beams subject to nonlinear forces. It is focused on the popular method which consists in multiplying the equation governing the displacement of the beam by the displacement-dependent denominator of the nonlinear (electrostatic) force before modal projection is performed. Having already shown that in the case of 1-mode, 1-harmonic analysis, this method can lead to dramatically wrong results, we propose another choice of multiplicative coefficient, with much improved behavior. This method is illustrated, discussed and compared to other approaches in terms of simplicity, accuracy and range of validity

Domaines: Micro et nanotechnologies/Microélectronique

Jérôme Juillard, Gabriel Vidal-Alvarez, Nuria Barniol. A further study of reduced-order modeling techniques for nonlinear MEMS beams. Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP), 2015 Symposium on, Apr 2015, Monptellier, France. pp.1-6, ⟨10.1109/DTIP.2015.7160983⟩. ⟨hal-01235620⟩