Skip to Main content Skip to Navigation
Journal articles

Conducting Probe Atomic Force Microscope as a Relevant Tool for Studying Some Phenomena in MEMS Switches

Alexis Peschot 1, 2 Maxime Vincent 1, 2 Christophe Poulain 2 Denis Mariolle 2 Frédéric Houzé 3 Jérôme Delamare 1 
1 G2ELab - Laboratoire de Génie Electrique de Grenoble
2 CEA-LETI - Commissariat à l'énergie atomique et aux énergies alternatives - Laboratoire d'Electronique et de Technologie de l'Information
3 GeePs - Laboratoire Génie électrique et électronique de Paris
Document type :
Journal articles
Complete list of metadata
https://hal-centralesupelec.archives-ouvertes.fr/hal-01235862
Contributor : Frédéric Houzé Connect in order to contact the contributor
Submitted on : Monday, November 30, 2015 - 6:56:18 PM
Last modification on : Saturday, June 25, 2022 - 10:18:02 PM

Identifiers

Collections

CEA | UPMC | UGA | CNRS | G2ELAB | CENTRALESUPELEC | GEEPS | PHEMADIC | DRT | UNIV-PARIS-SACLAY | LETI | SORBONNE-UNIVERSITE | CEA-GRE | SU-SCIENCES | GS-ENGINEERING | G2ELAB-MADEA | INSTITUT-SCIENCES-LUMIERE

Citation

Alexis Peschot, Maxime Vincent, Christophe Poulain, Denis Mariolle, Frédéric Houzé, et al.. Conducting Probe Atomic Force Microscope as a Relevant Tool for Studying Some Phenomena in MEMS Switches. Sensing and Imaging: An International Journal, Springer Verlag, 2015, 16, pp.21. ⟨10.1007/s11220-015-0124-1⟩. ⟨hal-01235862⟩

Export

BibTeX TEI DC DCterms EndNote Datacite

Share

Metrics

Record views

135