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Journal Articles Sensing and Imaging: An International Journal Year : 2015

Conducting Probe Atomic Force Microscope as a Relevant Tool for Studying Some Phenomena in MEMS Switches

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hal-01235862 , version 1 (30-11-2015)

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Alexis Peschot, Maxime Vincent, Christophe Poulain, Denis Mariolle, Frédéric Houzé, et al.. Conducting Probe Atomic Force Microscope as a Relevant Tool for Studying Some Phenomena in MEMS Switches. Sensing and Imaging: An International Journal, 2015, 16, pp.21. ⟨10.1007/s11220-015-0124-1⟩. ⟨hal-01235862⟩
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