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Conducting Probe Atomic Force Microscope as a Relevant Tool for Studying Some Phenomena in MEMS Switches

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https://hal-centralesupelec.archives-ouvertes.fr/hal-01235862
Contributor : Frédéric Houzé Connect in order to contact the contributor
Submitted on : Monday, November 30, 2015 - 6:56:18 PM
Last modification on : Thursday, February 17, 2022 - 9:26:34 AM

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Alexis Peschot, Maxime Vincent, Christophe Poulain, Denis Mariolle, Frédéric Houzé, et al.. Conducting Probe Atomic Force Microscope as a Relevant Tool for Studying Some Phenomena in MEMS Switches. Sensing and Imaging: An International Journal, Springer Verlag, 2015, 16, pp.21. ⟨10.1007/s11220-015-0124-1⟩. ⟨hal-01235862⟩

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