Skip to Main content Skip to Navigation
Journal articles

Conducting Probe Atomic Force Microscope as a Relevant Tool for Studying Some Phenomena in MEMS Switches

Complete list of metadatas

https://hal-centralesupelec.archives-ouvertes.fr/hal-01235862
Contributor : Frédéric Houzé <>
Submitted on : Monday, November 30, 2015 - 6:56:18 PM
Last modification on : Wednesday, September 16, 2020 - 5:48:53 PM

Identifiers

Citation

Alexis Peschot, Maxime Vincent, Christophe Poulain, Denis Mariolle, Frédéric Houzé, et al.. Conducting Probe Atomic Force Microscope as a Relevant Tool for Studying Some Phenomena in MEMS Switches. Sensing and Imaging: An International Journal, Springer Verlag, 2015, 16, pp.21. ⟨10.1007/s11220-015-0124-1⟩. ⟨hal-01235862⟩

Share

Metrics

Record views

336