Density of states measurements of RF-power, SiF4 and CH4 –tuned-hydrogenated microcrystalline silicon carbon alloy thin films using Fourier transform photocurrent spectroscopy (FTPS)

N. Puspitosari , S. Gaiaschi , C. Longeaud (1) , M. E. Gueunier , E. V. Johnson

1 GeePs - Laboratoire Génie électrique et électronique de Paris

Domaines: Sciences de l'ingénieur [physics]

N. Puspitosari, S. Gaiaschi, C. Longeaud, M. E. Gueunier, E. V. Johnson. Density of states measurements of RF-power, SiF4 and CH4 –tuned-hydrogenated microcrystalline silicon carbon alloy thin films using Fourier transform photocurrent spectroscopy (FTPS). European Photovoltaïc Solar Energy Conference, Sep 2015, Hambourg, Germany. Proceedings of the European Photovoltaïc Solar Energy Conference. ⟨hal-01242764⟩