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Electrical properties of hydrogenated microcrystalline silicon carbon alloys: effect of deposition parameters and light soaking

Sofia Gaiaschi 1, 2 Marie-Estelle Farret-Gueunier 2 Christophe Longeaud 2 Eric Johnson 1
1 IMM - Istituto per la Microelettronica e Microsistemi [Catania]
2 GeePs - Laboratoire Génie électrique et électronique de Paris
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https://hal-centralesupelec.archives-ouvertes.fr/hal-01274543
Contributor : Christophe Longeaud Connect in order to contact the contributor
Submitted on : Tuesday, February 16, 2016 - 8:00:28 AM
Last modification on : Thursday, September 9, 2021 - 3:03:01 AM

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Sofia Gaiaschi, Marie-Estelle Farret-Gueunier, Christophe Longeaud, Eric Johnson. Electrical properties of hydrogenated microcrystalline silicon carbon alloys: effect of deposition parameters and light soaking. Journal of Physics D: Applied Physics, IOP Publishing, 2015, 48, pp.285101. ⟨10.1088/0022-3727/48/28/285101⟩. ⟨hal-01274543⟩

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