Electrical properties of hydrogenated microcrystalline silicon carbon alloys: effect of deposition parameters and light soaking

Sofia Gaiaschi; Marie-Estelle Farret-Gueunier; Christophe Longeaud; Eric Johnson

doi:10.1088/0022-3727/48/28/285101

Journal articles

Electrical properties of hydrogenated microcrystalline silicon carbon alloys: effect of deposition parameters and light soaking

Sofia Gaiaschi ^{1, 2} Marie-Estelle Farret-Gueunier ² Christophe Longeaud ² Eric Johnson ¹

1 IMM - Istituto per la Microelettronica e Microsistemi [Catania]

2 GeePs - Laboratoire Génie électrique et électronique de Paris

Document type :

Journal articles

Domain :

Physics [physics]

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https://hal-centralesupelec.archives-ouvertes.fr/hal-01274543
Contributor : christophe longeaud Connect in order to contact the contributor
Submitted on : Tuesday, February 16, 2016 - 8:00:28 AM
Last modification on : Sunday, June 26, 2022 - 5:21:58 AM

Electrical properties of hydrogenated microcrystalline silicon carbon alloys: effect of deposition parameters and light soaking

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Electrical properties of hydrogenated microcrystalline silicon carbon alloys: effect of deposition parameters and light soaking

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