Photoacoustic microscopy by photodeformation applied to the determination of thermal diffusivity

Abstract : Photoacoustic microscopy by photodeformation can be used to generate imagery on a micrometric scale. It may be used for nondestructive testing, especially in the microelectronics industry. A quantitative application of this method is presented here, for making relative measurements of thermal diffusivity of samples of a few tens of cubic micrometers in volume. The measurement is relative because it requires a reference sample of known diffusivity. Possible applications are thin films, very small homogeneous samples, samples exhibiting high gradients of thermal properties, thin coatings, etc... Some results are presented for bulk materials and diamond-like carbon thin coatings.
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Proceedings of the SPIE, 1991, Thermosense XIII, 1467, pp.278-289. 〈10.1117/12.46442〉
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Daniel Balageas, Daniel Boscher, Alain Déom, Franck Enguehard, Laurence Noirot. Photoacoustic microscopy by photodeformation applied to the determination of thermal diffusivity. Proceedings of the SPIE, 1991, Thermosense XIII, 1467, pp.278-289. 〈10.1117/12.46442〉. 〈hal-01290143〉

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