Influence of Thermo-mechanical Effects induced by 3D Assembly on Silicon Microring Resonator

Audrey Michard 1, 2 Nicolas Michit 1 Jean-Baptiste Quelene 1 Jean-François Carpentier 1 Pietro Maris Ferreira 2
1 STMicroelectronics
2 GeePs - Laboratoire Génie électrique et électronique de Paris
Abstract : This paper presents the impact of 3D assembly on a silicon ring resonator. Indeed, the flip-chip integration used to connect photonic and electronic circuits requires high temperatures processes. The cooling of such a structure induces thermo-mechanical stresses on silicon waveguides. A finite element modelling is proposed to theoretically quantify the stress distribution. The photo-elastic effect is then highlighted to explain the change in silicon refractive index. As a result, the ring resonance wavelength is shifted from approximately 100 pm. Performance of a WDM (wavelength division multiplexing) system could thus be highly degraded.
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Communication dans un congrès
19th European Conference on Integrated Optics (ECIO), Apr 2017, Eindhoven, Netherlands. ECIO 2017 Proceedings, 2017, 〈https://www.ecio-conference.org/〉
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Dernière modification le : vendredi 31 août 2018 - 08:54:38
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Audrey Michard, Nicolas Michit, Jean-Baptiste Quelene, Jean-François Carpentier, Pietro Maris Ferreira. Influence of Thermo-mechanical Effects induced by 3D Assembly on Silicon Microring Resonator. 19th European Conference on Integrated Optics (ECIO), Apr 2017, Eindhoven, Netherlands. ECIO 2017 Proceedings, 2017, 〈https://www.ecio-conference.org/〉. 〈hal-01535044〉

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