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Wafer-scale epitaxial lift-off of optoelectronic grade GaN from a GaN substrate using a sacrificial ZnO interlayer

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https://hal-centralesupelec.archives-ouvertes.fr/hal-01632945
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Submitted on : Friday, November 10, 2017 - 5:49:16 PM
Last modification on : Tuesday, November 16, 2021 - 4:35:50 AM

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Akhil Rajan, David J Rogers, Cuong Ton-That, Liangchen Zhu, Matthew R Phillips, et al.. Wafer-scale epitaxial lift-off of optoelectronic grade GaN from a GaN substrate using a sacrificial ZnO interlayer. Journal of Physics D: Applied Physics, IOP Publishing, 2016, 49 (31), ⟨10.1088/0022-3727/49/31/315105⟩. ⟨hal-01632945⟩

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