Low temperature plasma enhanced atomic layer deposition of GaP films on Si substrates

Alexander S. Gudovskikh (1) , D. A. Kudryashov (1) , I.A. Morozov (1) , Artem Baranov (2, 1) , A.V. Uvarov (1) , Alexandra Levtchenko (2) , Sylvain Le Gall (2) , Jean-Paul Kleider (2)

1 Saint Petersburg Academic University
2 GeePs - Laboratoire Génie électrique et électronique de Paris

Domains: Materials Science [cond-mat.mtrl-sci]; Micro and nanotechnologies/Microelectronics; Electric power; Optics / Photonic; Materials

Alexander S. Gudovskikh, D. A. Kudryashov, I.A. Morozov, Artem Baranov, A.V. Uvarov, et al.. Low temperature plasma enhanced atomic layer deposition of GaP films on Si substrates. ICANS27, The 27th International Conference on Amorphous and Nanocrystalline Semiconductors, Aug 2017, Seoul, South Korea. ⟨hal-01632966⟩