Capacitance characterization of GaP/n-Si structures grown by PE-ALD

Artem Baranov 1, 2 Alexander S. Gudovskikh 2, 3 Arouna Darga 1 Sylvain Le Gall 1 Jean-Paul Kleider 1
1 GeePs - Laboratoire Génie électrique et électronique de Paris
2 Saint-Petersburg Scientific Center
3 Saint Petersburg Electrotechnical University "LETI"
Abstract : Thin layers of μc-GaP and a-GaP grown on n- type silicon wafers by plasmaenhanced atomic layer deposition at 380 C are characterized by space charge capacitance techniques, C-V profiling and deep level transient spectroscopy (DLTS). Two defect levels with activation energies of 0.30 eV and 0.80 eV were detected by DLTS in the μc-GaP/n-Si structure. Measurements performed on Schottky barriers formed on n-Si after selective etching of the GaP layer did not reveal any defect level meaning that the observed defects in the μc-GaP/n-Si structure are related to μc-GaP layer.
Type de document :
Poster
4th International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures (Saint-Petersburg OPEN 2017), Apr 2017, Saint-Petersbourg, France. 917, pp.052027, 2017, Journal of Physics : Conference series. 〈10.1088/1742-6596/917/5/052027〉
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https://hal-centralesupelec.archives-ouvertes.fr/hal-01653684
Contributeur : Sylvain Le Gall <>
Soumis le : vendredi 1 décembre 2017 - 17:16:59
Dernière modification le : vendredi 16 novembre 2018 - 02:03:49

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CENTRALESUPELEC | UPMC | GEEPS | UNIV-PARIS-SACLAY | PHEMADIC | SORBONNE-UNIVERSITE

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Artem Baranov, Alexander S. Gudovskikh, Arouna Darga, Sylvain Le Gall, Jean-Paul Kleider. Capacitance characterization of GaP/n-Si structures grown by PE-ALD. 4th International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures (Saint-Petersburg OPEN 2017), Apr 2017, Saint-Petersbourg, France. 917, pp.052027, 2017, Journal of Physics : Conference series. 〈10.1088/1742-6596/917/5/052027〉. 〈hal-01653684〉

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