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Silicon doping of GaP layers grown by time-modulated PECVD

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https://hal-centralesupelec.archives-ouvertes.fr/hal-01801312
Contributor : Jean-Paul Kleider <>
Submitted on : Monday, May 28, 2018 - 1:39:18 PM
Last modification on : Wednesday, September 16, 2020 - 5:51:20 PM

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  • HAL Id : hal-01801312, version 1

Citation

Artem Baranov, I.A. Morozov, A.V. Uvarov, G. E. Yakovlev, Jean-Paul Kleider. Silicon doping of GaP layers grown by time-modulated PECVD. Saint-Petersburg OPEN 2018, 5th International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures, Apr 2018, Saint-Pétersbourg, Russia. ⟨hal-01801312⟩

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