Silicon doping of GaP layers grown by time-modulated PECVD

Artem Baranov (1, 2) , I.A. Morozov (1) , A.V. Uvarov (1) , G. E. Yakovlev , Jean-Paul Kleider (2)

1 Saint Petersburg Academic University
2 GeePs - Laboratoire Génie électrique et électronique de Paris

Domains: Materials Science [cond-mat.mtrl-sci]; Micro and nanotechnologies/Microelectronics; Electric power; Optics / Photonic; Materials

Artem Baranov, I.A. Morozov, A.V. Uvarov, G. E. Yakovlev, Jean-Paul Kleider. Silicon doping of GaP layers grown by time-modulated PECVD. Saint-Petersburg OPEN 2018, 5th International School and Conference on Optoelectronics, Photonics, Engineering and Nanostructures, Apr 2018, Saint-Pétersbourg, Russia. ⟨hal-01801312⟩