Skip to Main content Skip to Navigation
Conference papers

Low temperature plasma epitaxy of Silicon on III-V

Gwenaëlle Hamon 1 Nicolas Vaissiere Vaissière 1 Wanghua Chen 1 J Alvarez 2 Jean-Luc Maurice 1 Jean Decobert 3 Jean-Paul Kleider 2 Pere Roca I Cabarrocas Roca I Cabarrocas 1 
1 LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau]
2 GeePs - Laboratoire Génie électrique et électronique de Paris
3 III-V Lab - Alcatel-Thalès III-V lab
Document type :
Conference papers
Complete list of metadata
https://hal-centralesupelec.archives-ouvertes.fr/hal-01801476
Contributor : Jean-Paul KLEIDER Connect in order to contact the contributor
Submitted on : Monday, May 28, 2018 - 2:37:43 PM
Last modification on : Saturday, June 25, 2022 - 10:31:44 PM

Identifiers

  • HAL Id : hal-01801476, version 1

Collections

X | UPMC | CNRS | X-PICM | X-DEP-PHYS | LPICM | CENTRALESUPELEC | GEEPS | PHEMADIC | UNIV-PARIS-SACLAY | SORBONNE-UNIVERSITE | SU-SCIENCES | GS-ENGINEERING | INSTITUT-SCIENCES-LUMIERE

Citation

Gwenaëlle Hamon, Nicolas Vaissiere Vaissière, Wanghua Chen, J Alvarez, Jean-Luc Maurice, et al.. Low temperature plasma epitaxy of Silicon on III-V. EMRS Spring Meeting 2018, Jun 2018, Strasbourg, France. ⟨hal-01801476⟩

Export

BibTeX TEI DC DCterms EndNote Datacite

Share

Metrics

Record views

165