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Low temperature plasma epitaxy of Silicon on III-V

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https://hal-centralesupelec.archives-ouvertes.fr/hal-01801476
Contributor : Jean-Paul KLEIDER Connect in order to contact the contributor
Submitted on : Monday, May 28, 2018 - 2:37:43 PM
Last modification on : Saturday, June 25, 2022 - 10:31:44 PM

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  • HAL Id : hal-01801476, version 1

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Gwenaëlle Hamon, Nicolas Vaissiere Vaissière, Wanghua Chen, J Alvarez, Jean-Luc Maurice, et al.. Low temperature plasma epitaxy of Silicon on III-V. EMRS Spring Meeting 2018, Jun 2018, Strasbourg, France. ⟨hal-01801476⟩

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