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Low temperature plasma epitaxy of Silicon on III-V

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https://hal-centralesupelec.archives-ouvertes.fr/hal-01801476
Contributor : Jean-Paul Kleider <>
Submitted on : Monday, May 28, 2018 - 2:37:43 PM
Last modification on : Wednesday, September 16, 2020 - 5:51:20 PM

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  • HAL Id : hal-01801476, version 1

Citation

Gwenaëlle Hamon, Nicolas Vaissière, Wanghua Chen, J Alvarez, Jean-Luc Maurice, et al.. Low temperature plasma epitaxy of Silicon on III-V. EMRS Spring Meeting 2018, Jun 2018, Strasbourg, France. ⟨hal-01801476⟩

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