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Optical lithography of three-dimensional magnetophotonic microdevices

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https://hal-centralesupelec.archives-ouvertes.fr/hal-01803729
Contributor : Aurélia Olivier Kaiser <>
Submitted on : Wednesday, May 30, 2018 - 5:51:31 PM
Last modification on : Tuesday, June 16, 2020 - 5:04:02 PM

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Dam Thuy Trang Nguyen, Olivia del Guercio, Thi Huong Au, Duc Thien Trinh, Nguyen Phuong Thao Mai, et al.. Optical lithography of three-dimensional magnetophotonic microdevices. Optical Engineering, SPIE, 2018, 57 (04), ⟨10.1117/1.OE.57.4.041406⟩. ⟨hal-01803729⟩

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