HAL will be down for maintenance from Friday, June 10 at 4pm through Monday, June 13 at 9am. More information
Skip to Main content Skip to Navigation
Journal articles

High structural and optical quality of III-V-on-Si 1.2 nm-thick oxide-bonded hybrid interface

Abstract : In order to be compatiblewith CMOS processing, hybrid bonding of III-V materials on Silicon should be operated at 300 °C, which requires an interface layer. The thinnest layer could be obtained when surfaces are prepared oxide-free and activated. We have investigated several activation processes of de-oxidized surfaces and measured their activation efficiency by X-ray Photoelectron Spectroscopy. We report here on the high structural and optical quality of a hybrid III-V on Silicon interface obtained by bonding under vacuum at 300 °C deoxidized surfaces activated by ozone. The resulting oxide interface layer is 1.2-nm thick the thinnest already reported. Structural characterization of this interface shows no defect in both crystalline lattices. Hybrid shallow ridge waveguides supporting an optical mode overlapping such an interface show 5 cm−1 propagation losses comparable to the value measured for monolithic InP-based waveguides or SOI waveguides produced with the same technology, evidencing the high optical quality of the hybrid interface. Such a thin layer is favorable for an accurate control of the optical performances within hybrid devices and offers a large versatility for their design.
Complete list of metadata

https://hal-centralesupelec.archives-ouvertes.fr/hal-01806556
Contributor : David Alamarguy Connect in order to contact the contributor
Submitted on : Sunday, June 3, 2018 - 4:26:25 PM
Last modification on : Tuesday, January 4, 2022 - 4:29:03 AM

Identifiers

Citation

A. Talneau, G. Beaudoin, David Alamarguy, G. Patriarche. High structural and optical quality of III-V-on-Si 1.2 nm-thick oxide-bonded hybrid interface. Microelectronic Engineering, Elsevier, 2018, 192, pp.25 - 29. ⟨10.1016/j.mee.2018.02.007⟩. ⟨hal-01806556⟩

Share

Metrics

Record views

56