An Impact-Coupled MEMS Electrostatic Kinetic Energy Harvester and Its Predictive Model Taking Nonlinear Air Damping Effect Into Account

Yingxian Lu (1) , Jérôme Juillard (2) , Francesco Cottone (1, 3) , Dimitri Galayko (4) , Philippe Basset (1)

1 ESYCOM - Electronique, Systèmes de communication et Microsystèmes
2 GeePs - Laboratoire Génie électrique et électronique de Paris
3 Dipartimento di Fisica e Geologia [Perugia]
4 CIAN - Circuits Intégrés Numériques et Analogiques

Domains: Engineering Sciences [physics]; Engineering Sciences [physics]; Micro and nanotechnologies/Microelectronics

Yingxian Lu, Jérôme Juillard, Francesco Cottone, Dimitri Galayko, Philippe Basset. An Impact-Coupled MEMS Electrostatic Kinetic Energy Harvester and Its Predictive Model Taking Nonlinear Air Damping Effect Into Account. Journal of Microelectromechanical Systems, 2018, 27 (6), pp.1 - 13. ⟨10.1109/JMEMS.2018.2876353⟩. ⟨hal-01931269⟩