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Heteroepitaxial growth of Silicon on GaAs via low temperature plasma-enhanced chemical vapor deposition

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https://hal-centralesupelec.archives-ouvertes.fr/hal-01943466
Contributor : Jean-Paul Kleider <>
Submitted on : Monday, December 3, 2018 - 6:24:50 PM
Last modification on : Thursday, September 17, 2020 - 12:26:02 PM

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  • HAL Id : hal-01943466, version 1

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Guénaëlle Hamon, Nicolas Vaissière, Romain Cariou, Wanghua Chen, J Alvarez, et al.. Heteroepitaxial growth of Silicon on GaAs via low temperature plasma-enhanced chemical vapor deposition. Journées Nationales du PhotoVoltaïque (JNPV) 2018, Dec 2018, Dourdan, France. ⟨hal-01943466⟩

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