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Conference papers
Contactless conductivity measurement for ITO nanolayers on AsGa substrats over a wide frequency range
Abstract : We report on the application of a new contactless method based on eddy currents with a view to characterizing some transport properties of a large range of semiconductors. The innovative approach of this work consists in measuring the impedance of the coil by reflectometry using a broadband multicarrier test signal. The device works well with silicon wafers with a constant conductivity over a wide frequency range. Because of their electrical conductivity and high optical transmittance in the visible and near-IR regions of electromagnetic spectrum, indium tin oxide (ITO) films have motivated great interests in experimental studies and technological applications. The estimation of their electrical conductivity is a key point to develop these devices. On this paper we show that the setup can be used for the frequency characterization of ITO and AsGa nanolayers wich exhibit a frequency dependent behavior. The low frequency measurement are found in agreement with the classical four point probe setup.
Cited literature [2 references]
https://hal-centralesupelec.archives-ouvertes.fr/hal-01943876
Contributor : Florent Loete <>
Submitted on : Tuesday, December 4, 2018 - 11:18:55 AM
Last modification on : Thursday, December 10, 2020 - 10:51:57 AM
Contributor : Florent Loete <>
Submitted on : Tuesday, December 4, 2018 - 11:18:55 AM
Last modification on : Thursday, December 10, 2020 - 10:51:57 AM
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sensors2018.pdf
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