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Nonlinear operation of resonant sensors based on weakly-coupled resonators: experimental investigation of an actively-coupled architecture

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Abstract

This paper completes our previous work, dedicated to a theoretical analysis of the properties of nonlinearly-operated weakly-coupled resonators (WCRs) for resonant sensing applications. In particular, we investigate the relationships between the operating point of such devices and different performance indicators, such as parametric sensitivity, sensitivity to drive level and to noise, and bandwidth. To this end, a couple of high-Q MEMS resonators exhibiting nonlinear restoring and damping forces are used. A careful characterization of the resonators and their associated electronics is made, resulting in a very good, quantitative fit between the experimental results and those predicted by theory.
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Dates and versions

hal-01992556 , version 1 (07-02-2019)
hal-01992556 , version 2 (05-06-2019)

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  • HAL Id : hal-01992556 , version 2

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Jérôme Juillard, Ali Mostafa, Pietro Maris Ferreira. Nonlinear operation of resonant sensors based on weakly-coupled resonators: experimental investigation of an actively-coupled architecture. 2019. ⟨hal-01992556v2⟩
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