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Stress Effect on Thin Films

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https://hal-centralesupelec.archives-ouvertes.fr/hal-02285993
Contributor : Amandine Lustrement <>
Submitted on : Friday, September 13, 2019 - 12:07:45 PM
Last modification on : Wednesday, July 1, 2020 - 4:22:03 PM

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P.-E. Janolin. Stress Effect on Thin Films. Ferroelectric Dielectrics Integrated on Silicon, John Wiley & Sons, Inc, pp.27-70, 2013, ⟨10.1002/9781118602751.ch2⟩. ⟨hal-02285993⟩

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