Conference Papers
Year :
Jean-Paul KLEIDER : Connect in order to contact the contributor
https://hal-centralesupelec.archives-ouvertes.fr/hal-02344032
Submitted on : Sunday, November 3, 2019-7:10:51 PM
Last modification on : Friday, March 24, 2023-2:53:13 PM
Dates and versions
Identifiers
- HAL Id : hal-02344032 , version 1
Cite
Cyril Léon, Sylvain Le Gall, Marie-Estelle Gueunier-Farret, Jean-Paul Kleider, Pere Roca I Cabarrocas Roca I Cabarrocas. Electrical characterization of low temperature plasma epitaxial Si grown on highly doped Si substrates. 28th International Conference on Amorphous and nanocrystalline Semiconductors (ICANS 28), Aug 2019, Palaiseau, France. ⟨hal-02344032⟩
Collections
53
View
0
Download