Optimization of parameters for deposition of SnO2 films by sol-gel using Taguchi method

Youssef Ammaih (1) , Bouchaib Hartiti (1) , Abderraouf Ridah (1) , Abderrazak Lfakir (1) , Philippe Thevenin (2) , Maryam Siadate (2)

1 MAC & PM Laboratory, ANEPMAER Group, FSTM
2 LMOPS - Laboratoire Matériaux Optiques, Photonique et Systèmes

Transparent conductive SnO2 films were deposited on glass substrates by sol-gel spin coating method. Taguchi method was used to find the optimal deposition parameters, three influential parameters were selected in this experiment, Concentration of Tin (II) ions, annealing temperature and pre-annealing temperature. By employing the analysis of variance, we found that the annealing temperature and the precursor are the most influencing parameters on the properties of SnO2 films. Under the optimized deposition conditions, the SnO2 films showed high crystal quality, and high transmittance of 80% in the visible region. © 2015 IEEE.

Keywords: sol gel; Taguchi method; Tin Oxide

Domains: Engineering Sciences [physics]

Youssef Ammaih, Bouchaib Hartiti, Abderraouf Ridah, Abderrazak Lfakir, Philippe Thevenin, et al.. Optimization of parameters for deposition of SnO2 films by sol-gel using Taguchi method. IEEE International Renewable and Sustainable Energy Conference, IRSEC 2015, Dec 2015, Marrakech, Morocco. pp.7455041, ⟨10.1109/IRSEC.2015.7455041⟩. ⟨hal-02434088⟩