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Electrostatic vibration energy harvester using multimodal-shaped springs for pacemaker application

Abstract : This paper presents an innovative broadband electrostatic vibration energy harvester (eVEH) using miniaturized multimodal-shaped nonlinear springs for powering an autonomous pacemaker. The presented bioMEMS device has been designed for acceleration levels in the range of 1 g or lower, and a high frequency bandwidth in low frequency domain that allows harvesting of a real heartbeat excitation. An extensive study of the response of the device as a function of the heartbeat rate, the acceleration amplitude and its inclination with respect to the gravity field is performed. It is demonstrated that the presented device, with overall volume < 0.3 cm3, delivers up to 2.38 μW neat average power under real heartbeat excitation conditions with 10 m/s2 acceleration amplitude at 116 bpm. The harvester is using the Multimodal-shaped springs, which allow to construct the mechanical nonlinearity required for sensitive wideband device in a precise way while keeping the whole system sufficiently miniaturized. The device is fabricated with dedicated clean room process on silicon-on-glass (SoG) wafer. © 2018 IEEE.
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Submitted on : Thursday, January 23, 2020 - 5:18:55 PM
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Bogdan Vysotskyi, F. Parrain, X. Le Roux, E. Lefeuvre, P. Gaucher, et al.. Electrostatic vibration energy harvester using multimodal-shaped springs for pacemaker application. 20th Symposium on Design, Test, Integration and Packaging of MEMS and MOEMS, DTIP 2018, May 2018, Roma, Italy. pp.1-6, ⟨10.1109/DTIP.2018.8394216⟩. ⟨hal-02453307⟩



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