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Reliability of etching angle estimation of MEMS resonators from electrical measurements

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https://hal-centralesupelec.archives-ouvertes.fr/hal-02907054
Contributor : Jérôme Juillard <>
Submitted on : Monday, July 27, 2020 - 9:41:22 AM
Last modification on : Thursday, September 17, 2020 - 12:26:02 PM

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Alexis Brenes, Bogdan Vysotskyi, Elie Lefeuvre, Jérôme Juillard. Reliability of etching angle estimation of MEMS resonators from electrical measurements. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-4, ⟨10.1109/DTIP.2019.8752716⟩. ⟨hal-02907054⟩

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