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Reliability of etching angle estimation of MEMS resonators from electrical measurements

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Engineering Sciences [physics] Micro and nanotechnologies/Microelectronics

Jérôme Juillard  : Connect in order to contact the contributor

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Submitted on : Monday, July 27, 2020-9:41:22 AM

Last modification on : Saturday, June 25, 2022-10:49:56 PM

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hal-02907054 , version 1 (27-07-2020)

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Alexis Brenes, Bogdan Vysotskyi, Elie Lefeuvre, Jérôme Juillard. Reliability of etching angle estimation of MEMS resonators from electrical measurements. 2019 Symposium on Design, Test, Integration & Packaging of MEMS and MOEMS (DTIP), May 2019, Paris, France. pp.1-4, ⟨10.1109/DTIP.2019.8752716⟩. ⟨hal-02907054⟩

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