Observation by conductive-probe atomic force microscopy of strongly inverted surface layers at the hydrogenated amorphous silicon/crystalline silicon heterojunctions

Olga Alexandrovna Maslova (1) , José Alvarez (1) , E.V. Gushina , Wilfried Favre (1) , Marie-Estelle Gueunier-Farret , A.S. Gudovskikh , A.V. Ankudinov , E.I Terukov , Jean-Paul Kleider (1)

1 LGEP - Laboratoire de génie électrique de Paris

Olga Alexandrovna Maslova, José Alvarez, E.V. Gushina, Wilfried Favre, Marie-Estelle Gueunier-Farret, et al.. Observation by conductive-probe atomic force microscopy of strongly inverted surface layers at the hydrogenated amorphous silicon/crystalline silicon heterojunctions. Applied Physics Letters, 2010, 97 (25), pp.252110. ⟨hal-00557102⟩