Alexis Brenes, Jérôme Juillard, Laurent Bourgois, Filipe Vinci dos Santos. Characterization of capacitive MEMS resonators via nonlinear open-loop frequency responses.
2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) , Apr 2015, Montpellier, France. pp.1-6,
⟨10.1109/DTIP.2015.7161022⟩.
⟨hal-01235634⟩