Characterization of capacitive MEMS resonators via nonlinear open-loop frequency responses

Abstract : The aim of this paper is to demonstrate robust parameter extraction from the frequency response of MEMS devices exhibiting pronounced nonlinearities. We describe a general methodology, based on parameter extraction from nonlinear large-signal frequency response, whose accuracy appears to be limited in practice only by noise and by the mathematical model of the structure under consideration. We illustrate this by two complete case studies of capacitive MEMS resonators driven to large-amplitude regimes. Theoretical analysis, simulations and experimental measurements strongly support our conclusions.
Complete list of metadatas

https://hal-centralesupelec.archives-ouvertes.fr/hal-01235634
Contributor : Alexandra Siebert <>
Submitted on : Friday, December 4, 2015 - 2:24:42 PM
Last modification on : Thursday, March 21, 2019 - 1:08:12 PM
Long-term archiving on : Saturday, March 5, 2016 - 10:51:24 AM

File

BRENES_DTIP2015.pdf
Files produced by the author(s)

Identifiers

Citation

Alexis Brenes, Jérôme Juillard, Laurent Bourgois, Filipe Vinci dos Santos. Characterization of capacitive MEMS resonators via nonlinear open-loop frequency responses. 2015 Symposium on Design, Test, Integration and Packaging of MEMS/MOEMS (DTIP) , Apr 2015, Montpellier, France. pp.1-6, ⟨10.1109/DTIP.2015.7161022⟩. ⟨hal-01235634⟩

Share

Metrics

Record views

213

Files downloads

138