Alexis Brenes, Jérôme Juillard, Laurent Bourgois, Filipe Vinci dos Santos. Influence of the driving waveform on the open-loop frequency response of MEMS resonators with nonlinear actuation schemes.
Journal of Microelectromechanical Systems, Institute of Electrical and Electronics Engineers, 2016, 25 (4), pp.812 - 820.
⟨10.1109/JMEMS.2016.2560260⟩.
⟨hal-01357855⟩