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The role of oxygen in magnetron sputtered Ta3N5 films for water photoelectrolysis

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hal-01363717 , version 1 (11-09-2016)

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  • HAL Id : hal-01363717 , version 1

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Martin Rudolph, D. Stanescu, J Alvarez, E. Foy, Jean-Paul Kleider, et al.. The role of oxygen in magnetron sputtered Ta3N5 films for water photoelectrolysis. E-MRS 2016 Spring Meeting, May 2016, Lille, France. ⟨hal-01363717⟩
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