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Conference papers
Study of Electronic Properties of Hydrogenated Amorphous Silicon Thin Film from SiH4/H2 using Tailored Voltage Waveforms
Junkang Wang
1
Federico Ventosinos
1
Christophe Longeaud
2
Bastien Bruneau
1
D. Daineka
1
Mustapha Elyaakoubi
3
E. Stephanos
3
Jean-Paul Kleider
2
Erik Johnson
1
Junkang Wang 1
Author
Federico Ventosinos 1
Author
Christophe Longeaud 2
Author IdHAL : christophe-longeaud
Bastien Bruneau 1
Author
D. Daineka 1
Author
Mustapha Elyaakoubi 3
Author
E. Stephanos 3
Author
Jean-Paul Kleider 2
Author IdHAL : jean-paul-kleider ORCID : https://orcid.org/0000-0003-4388-6326
Erik Johnson 1
Author IdHAL : erikvjohnson ORCID : https://orcid.org/0000-0003-0920-2111
1
LPICM - Laboratoire de physique des interfaces et des couches minces [Palaiseau] (bat. 408 Route de Saclay 91128 PALAISEAU CEDEX - France)
- CNRS - Centre National de la Recherche Scientifique : UMR7647 (France)
- X - École polytechnique (École polytechnique, 91128 Palaiseau Cedex - France)
2
GeePs - Laboratoire Génie électrique et électronique de Paris (11, rue Joliot Curie
Plateau de Moulon
91192 Gif sur Yvette - France)
- UP11 - Université Paris-Sud - Paris 11 (Bâtiment 300 - 91405 Orsay cedex - France)
- UPMC - Université Pierre et Marie Curie - Paris 6 (4 place Jussieu - 75005 Paris - France)
- CentraleSupélec (3, rue Joliot Curie, Plateau de Moulon, 91192 GIF-SUR-YVETTE Cedex - France)
- CNRS - Centre National de la Recherche Scientifique : UMR8507 (France)
3
TFSC-Instrument (3 Rue Léon Blum, 91120, Palaiseau - France)
Document type :
Conference papers
Domain :
Complete list of metadata
https://hal-centralesupelec.archives-ouvertes.fr/hal-01363727
Contributor : Jean-Paul Kleider Connect in order to contact the contributor
Submitted on : Sunday, September 11, 2016 - 2:48:02 PM
Last modification on : Wednesday, September 8, 2021 - 6:07:22 PM
Contributor : Jean-Paul Kleider Connect in order to contact the contributor
Submitted on : Sunday, September 11, 2016 - 2:48:02 PM
Last modification on : Wednesday, September 8, 2021 - 6:07:22 PM
Identifiers
- HAL Id : hal-01363727, version 1
Collections
CNRS | X | LPICM | UPMC | GEEPS | X-PICM | CENTRALESUPELEC | PHEMADIC | X-DEP-PHYS | SORBONNE-UNIVERSITE | SU-SCIENCES | ANR | GS-ENGINEERING | INSTITUT-SCIENCES-LUMIERE
Citation
Junkang Wang, Federico Ventosinos, Christophe Longeaud, Bastien Bruneau, D. Daineka, et al.. Study of Electronic Properties of Hydrogenated Amorphous Silicon Thin Film from SiH4/H2 using Tailored Voltage Waveforms. E-MRS 2016 Spring Meeting, May 2016, Lille, France. ⟨hal-01363727⟩
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